Estimation of plasma ion saturation current and reduced tip arcing using Langmuir probe harmonics
نویسندگان
چکیده
منابع مشابه
Particle-in-cell simulations of planar and cylindrical Langmuir probes: Floating potential and ion saturation current
Particle-in-cell and hybrid electron-Boltzmann simulations of planar and cylindrical Langmuir probes are compared with various probe theories. Floating potentials for planar and cylindrical probes are calculated and significant deviations from the typical approximation used for argon discharges of 5Te are shown. The interpretation of simulated ion saturation currents by the orbital motion limit...
متن کاملUnderstanding Langmuir probe current-voltage characteristics
I give several simple examples of model Langmuir probe current-voltage I-V characteristics that help students learn how to interpret real I-V characteristics obtained in a plasma. Students can also create their own Langmuir probe I-V characteristics using a program with the plasma density, plasma potential, electron temperature, ion temperature, and probe area as input parameters. Some examples...
متن کاملInfluence of O2 and N2 Concentrations on the Characteristics of Plasma in DC Cylindrical Magnetron Discharge by Langmuir Probe
Using the Langmuir probe method, the reactive plasma parameters were studied in different ratios of oxygen and nitrogen concentrations in a DC cylindrical discharge device.The plasma parameters such as plasma potential, electron density and electron temperature wereextracted from the current-voltage characteristic’s curve of Langmuir probe to find the optimum conditions for deposit the oxy...
متن کاملDouble Langmuir probe measurement of plasma parameters in a dc glow discharge
In this paper, plasma main characteristics such as electron mean temperature, electron number density, and oscillation frequency have been measured experimentally using the double Langmuir probe diagnostic system. In our experiment, the plasma was generated by applying the low pressure dc glow discharge in several common gases. The experimental results indicated the highest plasma density and o...
متن کاملEvaluation of Langmuir probe ion density measurement in weakly ionized discharges using plasma oscillation probes and microwave interferometry
A comparison study is made of the classical theories of the determination of the ion density Ni from the ion current Ii to a cylindrical Langmuir probe vs bias voltage Vb in weakly ionized RF plasmas. A broad parameter range is examined in a commercial inductively coupled plasma (ICP). Accurate local electron density Ne values (Ne,MWI) obtained from Abel inversion of chord-averaged microwave in...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2017
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.4978453